Effects of applying stress on the electron field emission properties in amorphous carbon thin films
نویسندگان
چکیده
Diamond-like carbon sDLCd films have always had high intrinsic stress due to their metastable structure and the fine balance between film density and bond stability. We show the effects of high intrinsic stress on the electron field emission performance, where a lower electric field for emission is recorded with increasing stress in the DLC films. In addition to examining “as deposited” films with different magnitudes of intrinsic stress, we subject the DLC films to external pressure by physically bending the a-C/silicon substrates. The result is a phenomenon where electrons are “squeezed” out of the films, and can be applied to the fabrication of stress sensors. © 2005 American Institute of Physics. fDOI: 10.1063/1.1940129g
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